Date

Place

[44-4]
10:15 ~ 10:40
Title:[Invited] Inorganic-Based Heterogeneously Integrated Flexible Transistors and Sensors
Kuniharu?Takei (Osaka Prefecture Univ., Japan)
Abstract: Mechanically flexible and stretchable devices have attracted much attention for a next class of electronics such as flexible photovoltaics, flexible displays, and wearable electronics. In this talk, integrated transistors and sensors on a flexible substrate are demonstrated using especially inorganic nanomaterials to form the active components. For a flexible thin film transistor (TFT) application, carbon nanotube network film for p-type TFTs and amorphous InGaZnO film for n-type TFTs were integrated to fabricate a complementary metal-oxide-semiconductor (CMOS) inverter circuit on a flexible substrate. The performance in terms of voltage gain and low power consumption is better than or comparable to other previous reports. Furthermore, temperature sensor was also integrated with the CMOS circuits to show the possibility of flexible CMOS/Sensor integration for the future practical applications. Furthermore, different types of mechanical sensors that can be used for a variety of device applications such as a human interactive device, a robotics, and a wearable devices as examples are introduced. For these demonstrations, printing methods such as a screen printing was developed to form temperature and strain sensors for low-cost, macroscale, flexible devices.
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