Date
Place
- Room H (Room Hall 1, 1F)
- P1. Poster Session I
- August 20, 2015 (Thursday)
- 14:00 ~ 15:30
- [P1-53]
- 14:00 ~ 15:30
- Title:Thin-Film Laser Lift-Off for Dual-Mode Display Application
- Jong-Heon Yang (ETRI, Korea), Sang Chul Lim (Gumi Electronics and Information Tech. Research Inst., Korea), Chun-Won Byun, Hyunkoo Lee, Byoung-Hwa Kwon, Jong Tae Lim, Seong M. Cho (ETRI, Korea), Seunghyup Yoo (KAIST, Korea), Sung Haeng Cho, and Chi-Sun Hwang (ETRI, Korea)
Abstract: A reflective/emissive dual-mode display can reduce power consumption and enhance image quality by swtiching its mode depending on surrounding brightness. By integrating two fucntional devices or displays in a single panel, it could reduce panel thickness and manufacturing cost, and invent a new application. It needs a very thin layer structure, which has fuctional devices and interconnection lines above and below. Lifting of this thin layer off a carrier substrate and making it intact is important. ?An aim of our experiments was to investigate a sacrificial multi-layer structure for laser lift-off, which can transfer sub-10-¥ìm-thick thin layer. By adjusting deposition process of sacrifical layer and inserting thermal barrier layer, we could reduce a laser energy for lift-off and thermal budget to device above. Cracks and wrinkles of thin layer suppressed by optimum laser energy. To demonstrate thin layer lift-off, we fabricated dummy structure with green fabry-perot reflector integrated in OLED encapsulation on 5-¥ìm-thick thin layer, which has double-sided ITO anode electrodes, and sucessfully lifted off thin layer structure from carrier glass. In the near future, this thin layer lift-off will be key integration process for reflective/emissive dual-mode display application.
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