Date
Place
- Room F (Room 320)
- 46. UI for Flexible/Transparent
- August 21, 2015 (Friday)
- 09:00 ~ 10:30
- [46-4]
- 10:15 ~ 10:30
- Title:Deposition of Graphene on Flexible Web Using Roll-to-Roll Microwave Plasma CVD
- Takatoshi Yamada (AIST, Japan), Nayuta Shimada, Kazuki Uekusa (Tech. Research Association for Single Wall Carbon Nanotube, Japan), and Masataka Hasegawa (AIST, Japan)
Abstract: Flexible transparent conductive films are important parts for next-generation opto-electronic applications. Graphene is one of the appropriate materials for flexible transparent films, since an ideal mono-layer graphene has transmittance of 97.7 % and electron mobility of 200,000 cm2/Vs at room temperature. These superior properties of graphene are obtained from mechanically exfoliated pieces. Therefore, graphene films in larger size are desired for practical applications. In our previous studies, graphene depositions by roll-to-roll microwave plasma CVD at low temperatures of about 300¨¬C have been reported. We obtained 600 mm in width and 200 m in length using our system. However, it is necessary to reduce the wrinkles due to roll-to-roll process (not thermal effects). ?Depositions of graphene films on various webs are advantages of the low temperature roll-to-roll plasma CVD processes. In this paper, Cu thin film/polyimide (Cu/PI), which is the flexible web, was used as the web for roll-to-roll graphene deposition in order to reduce wrinkles. It is confirmed that the use of Cu/PI suppresses the formation of wrinkles during the roll-to-roll deposition process. Decrease of the sheet resistance in fabricated graphene transparent conductive film is confirmed.
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