Date
Place
- Room D (Room 322)
- 4. 2D Materials: Synthesis and Manufacturing
- August 19, 2015 (Wednesday)
- 09:00 ~ 10:05
- [4-3]
- 09:50 ~ 10:05
- Title:Large Area Synthesis of 2-Dimensional Materials
- Jinhwan Lee, Youngchan Kim, and Changgu Lee (Sungkyunkwan Univ., Korea)
Abstract: I will present synthesis methods of large area molybdenum disulfide. For the synthesis of large area and uniform thin films of MoS2, we used chemical vapor deposition with a gas precursor, H2S for sulfurization of Mo. We deposited Mo metal first on solid substrates and sulfurized the metal at high temperatures. The synthesized MoS2 films were almost perfectly uniform over the entire area of 2 inch wafer. We also synthesized MoS2 films with MoO3 and H2S for high quality films. We could synthesize MoS2 films up to 15cm with high uniformity and excellent electrical properties. In order to lower the synthesis temperature, we adopted plasma enhanced CVD method. Down to 150C, we could synthesize uniform films of MoS2. We characterized the various optical and electrical properties of the synthesized films.
PDF Download
Type
